| Item |
Products |
| PFA
TRAP TANK |
| H (HEIGHT) |
BODY
: 295mm(± 1mm) / TUBE MAX' : 1m |
| O.D (OUTSIDE
DIAMETER) |
Ø67mm |
| WALL THICKNESS |
3mm |
| CAPACITY |
0.76L |
| MATERIALS |
PFA
(PIPE & END CAPS) |
| SURFACE TREATMENT |
PFA
Roughness : Ra=0.05㎛ |
| CLEANING |
GENERAL
(semiconductor equipment) |
| DESIGN PRESSURE
& TEMPERATURE |
See
: 3. Performance Curves ( - Maximum Pressure Rating) |
| Port configurations |
maximum
of 4 on top & 4 on bottom |
| Port size(Tube
size) |
4mm
~ 10mm (1/4" ~3/8") |
