| Item |
Products |
| 1L
SOLID BOTTLE |
2.5L
BUFFER TANK |
5L
BUFFER TANK |
7L
BUFFER TANK |
| H
(HEIGHT)1/4" |
182±
1mm |
247
± 1mm |
386
± 1mm |
492
± 1mm |
| I.D
(INSIDE DIAMETER)3/8" |
Ø100mm |
Ø148mm |
Ø148mm |
Ø148mm |
| CAPACITY1/2" |
1.2L |
2.7L |
5.2L |
7.3L |
| OPERATED
CAPACITY3/4" |
1L |
2.5L |
5L |
7L |
| MATERIALS |
COVER
Flange |
PFA
SOLID (15mm) |
SUS304(11mm)
+ PFA(3.5mm) |
| BODY |
PFA
SOLID (7mm) |
SUS304(3mm)
+ PFA(7mm) |
| BOLT/NUT |
N/A |
SUS304
/ SUS316 |
| GASKET |
N/A |
PTFE |
| GASKET |
OUT
SIDE |
"PFA
Roughness :
Ra=0.05μm" |
BUFFING
#300 |
| IN
SIDE |
PFA
Roughness : Ra=0.05μm |
| CLEANING |
GENERAL
(semiconductor equipment) |
| DESIGN
PRESSURE & TEMPERATURE |
See
: 3. Performance Curves ( - Maximum Pressure Rating) |
| VACUUM
CONDITIONS |
25"
Hg (980 mbar) |
| NOZZLE
Q'TY |
COVER
( 5EA) / BTM (1EA) |
COVER
( 11EA) / BTM (1EA) |
| NOZZLE
SIZE |
1/4"
OR 3/8"(CUSTOMER CHOSE) |
